Air Bearing | Troubleshooting


The movement of the air bearing is not smooth or not moving

Clean Dry Air

Membrane dryers or Refrigeration dryers are commercially available from manufacturers of air equipment.
Clean Dry Air (CDA) is supplied as facility in a semiconductor manufacturing factory, but a minimum CDA unit is also required on the equipment side.

Filtration degree 0.01µm (99.99% capture of the particle diameter) or less
Oil mist concentration 0.1mg/m3(ANR)≒0.08ppm
Atmospheric pressure dew point. -15℃ or less

Minimal CDA unit