Air Bearing | Troubleshooting
The movement of the air bearing is not smooth or not moving
Clean Dry Air
Membrane dryers or Refrigeration dryers are commercially available from manufacturers of air equipment.
Clean Dry Air (CDA) is supplied as facility in a semiconductor manufacturing factory, but a minimum CDA unit is also required on the equipment side.
|Filtration degree||0.01µm (99.99% capture of the particle diameter) or less|
|Oil mist concentration||0.1mg/m3(ANR)≒0.08ppm|
|Atmospheric pressure dew point.||-15℃ or less|