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Air Bearing | Troubleshooting

Troubleshooting

The movement of the air bearing is not smooth or not moving

Check the air pressure and dryness by indicator. Possible causes are drop of supply air pressure and penetration of water droplets or grinding fluid into the bearing clearance.Try supplying dry air for about 24 hours, if only water droplets are the cause, it will recover. Check the clamp torque and flatness of the mounting base and plate by the AB instruction. Try to loosen the screw, if the clamp torque or flatness of the mounting base or plate is the cause, it will move smoothly. Are there any differences related to temperature conditions? The material to be mounted should have the same coefficient of thermal expansion as the air bearing. The bimetal effect causes problems due to distortion. If it does not recover, do not force it and contact Canon MJ.

Clean Dry Air

Membrane dryers or Refrigeration dryers are commercially available from manufacturers of air equipment.
Clean Dry Air (CDA) is supplied as facility in a semiconductor manufacturing factory, but a minimum CDA unit is also required on the equipment side.

Filtration degree 0.01µm (99.99% capture of the particle diameter) or less
Oil mist concentration 0.1mg/m3(ANR)≒0.08ppm
Atmospheric pressure dew point. -15℃ or less

Minimal CDA unit