Air Bearing | Specification
Products : Air Bearing (Small size)
Notices
-
The values below are measured under the condition of air supply pressure 490kpa (5kgf/cm2).
-
Air bearings need dry and clean air which is free from water and oil. Additionally an air clean unit is required.
-
The "RV" type has two vacuum holes on the thrust plate that can be used for wafer checking.
Air Bearing (Small size)
| series specifications |
AB-30RH | AB-50R AB-50RV |
AB-50LRV | AB-80R AB-80RV |
AB-100R AB-100RV |
AB-150RⅡ |
|---|---|---|---|---|---|---|
| Radial stiffness (N/μm) |
12.7 | 24.5 | 49 | 34.3 | 56 | 110 |
| Common use radial load capacity (N) |
25.4 | 49 | 98 | 68.6 | 112 | 220 |
| MAX radial load capacity (N) |
31.8 | 61.3 | 122.5 | 85.8 | 140 | 275 |
| Axial stiffness (N/μm) |
19.6 | 35.3 | 35.3 | 205.8 | 370 | 650 |
| Common use axial load capacity (N) |
39.2 | 70.6 | 70.6 | 411.6 | 740 | 1300 |
| MAX axial load capacity (N) |
49 | 88.2 | 88.2 | 514.5 | 925 | 1625 |
| Radial rotation accuracy (μm) |
0.07 | 0.05 | 0.05 | 0.05 | 0.05 | 0.05 |
| Axial rotation accuracy (μm) |
0.04 | 0.03 | 0.03 | 0.03 | 0.03 | 0.03 |
| Max revolutions per minute (rpm) |
30,000 | 20,000 | 22,000 | 15,000 | 10,000 | 5,000 |
| Air consumption (Nl/min) |
4 | 6 | 12 | 8 | 10 | 15 |
| Rotating part moment of inertia (kg, m2) |
1.23×10-5 | 1.92×10-4 | 2.47×10-4 | 1.32×10-3 | 4.85×10-3 | 2.98×10-2 |
| Mass (kg) | 0.3 | 1.5 | 2.3 | 3.9 | 8.5 | 22 |
* The values above are measured under the condition of air supply pressure 490kpa (5kgf/cm2).
* Air bearings need dry and clean air which is free from water and oil. Additionally an air clean unit is required.
Products : Air Bearing (Large size)
Notices
-
The values below are measured under the condition of air supply pressure 490kpa (5kgf/cm2).
-
Air bearings need dry and clean air which is free from water and oil. Additionally an air clean unit is required.
Air Bearing (Large size)
| series specifications |
AB-150RⅡ | AB-200R | AB-200RH | AB-250RS | AB-300R | AB-400R | AB-600R |
|---|---|---|---|---|---|---|---|
| Radial stiffness (N/μm) |
110 | 170 | 116.6 | 210 | 392 | 333.2 | 392 |
| Common use radial load capacity (N) |
220 | 340 | 233.2 | 420 | 784 | 666.4 | 784 |
| MAX radial load capacity (N) |
275 | 425 | 291.5 | 525 | 980 | 833 | 980 |
| Axial stiffness (N/μm) |
650 | 810 | 493.3 | 1280 | 1234.8 | 1705.2 | 2400 |
| Common use axial load capacity (N) |
1300 | 1620 | 986.6 | 2560 | 2470 | 3410 | 9800 |
| MAX axial load capacity (N) |
1625 | 2025 | 1233 | 3200 | 3087 | 4263 | - |
| Radial rotation accuracy (μm) |
0.05 | 0.05 | 0.05 | 0.05 | 0.05 | 0.09 | 0.05 |
| Axial rotation accuracy (μm) |
0.03 | 0.03 | 0.03 | 0.03 | 0.05 | 0.05 | 0.05 |
| Max revolutions per minute (rpm) |
5,000 | 3,000 | 4,000 | 2,500 | 1,500 | 500 | 120 |
| Air consumption (Nl/min) |
15 | 20 | 25 | 35 | 40 | 40 | 100 |
| Rotating part moment of inertia (kg, m2) |
2.98×10-2 | 6.00×10-2 | 6.00×10-2 | 2.77×10-1 | 6.30×10-1 | 1.60 | - |
| Mass (kg) | 22 | 39 | 39 | 72 | 110 | 160 | 580 |
* The values above are measured under the condition of air supply pressure 490kpa (5kgf/cm2).
* Air bearings need dry and clean air which is free from water and oil. Additionally an air clean unit is required.